在室温和10 Pa氩气环境中，引入平行于靶面方向的直流电场，通过改变脉冲激光能量密度烧蚀单晶硅靶，在与羽辉轴线呈不同角度的衬底上沉积纳米硅晶薄膜。利用扫描电子显微镜和拉曼散射谱对沉积样品进行分析，结果表明：随着激光能量密度的增加，位于相同角度衬底上的晶粒尺寸和面密度逐渐变大；在同一激光能量密度下，零度角处衬底上的晶粒尺寸和面密度最大，且靠近接地极板处的值比与之对称角度处略大。通过朗缪尔探针对不同能量密度下烧蚀羽辉中硅离子密度变化的诊断、结合成核区内晶粒成核生长动力学过程，对晶粒分布特性进行了分析。

在10 Pa的Ar环境气体中，采用脉冲激光烧蚀技术，分别在半径为2.0，2.5，3.0，3.5和4.0 cm的半圆环不同角度处的衬底上制备了一系列含有纳米晶粒的Si晶薄膜。使用扫描电子显微镜、X射线衍射仪和拉曼光谱仪对其表面形貌和微观结构进行分析表征。结果表明，纳米Si晶粒的平均尺寸和烧蚀粒子的阻尼系数均相对于羽辉轴向呈对称分布，并随着与羽辉轴向夹角的增大而减小；同时，随着衬底半径的增加，晶粒平均尺寸和阻尼系数均逐渐减小。

基于PZT压电陶瓷驱动器的非球面能动抛光盘，能够在PZT驱动器的作用下改变面形，用于中小口径非球面镜加工。研制了一个口径100 mm、含19个PZT驱动器的非球面能动抛光盘，用于口径为350 mm、k＝－1.112 155、顶点半径为840 mm的双曲面镜的加工实验。为研究PZT压电陶瓷驱动器迟滞效应对非球面能动抛光盘输出面形的影响，实测各PZT压电陶瓷驱动器的电压位移特性曲线，用基于径向基函数的神经网络算法建立了各PZT压电陶瓷驱动器位移输出特性的数学模型并实施补偿，实测了各PZT压电陶瓷驱动器迟滞补偿前后的位移输出值。最后，利用有限元分析方法，得到了迟滞补偿前后非球面能动抛光盘的输出面形RMS以及剩余残差RMS分别为1.910 μm和0.342 μm。通过补偿各PZT压电陶瓷驱动器的迟滞效应，非球面能动抛光盘输出面形精度得到了提高，剩余残差RMS减少了82%。

The spectroscopic data recorded by dispersion spectrophotometer are usually degraded by the response function of the instrument. To improve the resolving power, double or triple cascade spectrophotometer and narrow slits have been employed, but the total flux of the radiation decreases accordingly, resulting in a lower signal-to-noise ratio (SNR) and a longer measuring time. However, the spectral resolution can be improved by mathematically removing the effect of the instrument response function. Based on the Shalvi-Weinstein criterion, a Gauss-Newton based kurtosis blind deconvolution algorithm for spectroscopic data is proposed. Experiments with some real measured Raman spectroscopic data show that this algorithm has excellent deconvolution capability.

A constrained high-order statistical algorithm is proposed to blindly deconvolute the measured spectral data and estimate the response function of the instruments simultaneously. In this algorithm, no prior-knowledge is necessary except a proper length of the unit-impulse response. This length can be easily set to be the width of the narrowest spectral line by observing the measured data. The feasibility of this method has been demonstrated experimentally by the measured Raman and absorption spectral data.